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US Patent 11673275 Through-beam auto teaching

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
February 6, 2020
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Date of Patent
June 13, 2023
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Patent Application Number
16784193
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Patent Citations
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US Patent 7233842 Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
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US Patent 7453160 Simplified wafer alignment
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US Patent 7522267 Substrate transport apparatus with automated alignment
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US Patent 7706919 Wafer position teaching method and teaching jig
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US Patent 7976263 Integrated wafer transfer mechanism
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US Patent 8112177 Wafer position teaching method and teaching tool
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US Patent 8500388 Semiconductor wafer handling and transport
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US Patent 8934706 Wafer center finding with kalman filter
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US Patent 8958911 Mobile robot
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US Patent 9265583 Method for image-based robotic surgery
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11673275
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Patent Primary Examiner
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Jeff A Burke
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CPC Code
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B25J 9/042
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