Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masaru Adachi0
Masaru Shigesada0
Mitsunori Kawabe0
Date of Patent
April 27, 2010
Patent Application Number
10488694
Date Filed
September 6, 2002
Patent Citations Received
Patent Primary Examiner
Patent abstract
An object is to provide a method for teaching the position of a semiconductor wafer automatically and accurately without relying on the sight of an operator as well as a teaching jig that is used for the above method.
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