US Patent 7706919 Wafer position teaching method and teaching jig
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Patent abstract
An object is to provide a method for teaching the position of a semiconductor wafer automatically and accurately without relying on the sight of an operator as well as a teaching jig that is used for the above method.
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Patent Inventor Names
Masaru Adachi0
Masaru Shigesada0
Mitsunori Kawabe0
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US Patent 07706919 Wafer position teaching method and teaching jig US Patent 7706919 Wafer position teaching method and teaching jig
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Patent Number
07706919
Patent Number
7706919
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Official Website
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US Patent 07706919 Wafer position teaching method and teaching jig
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Patent jurisdiction
Patent number
07706919
Date of patent
April 27, 2010
Patent application number
10488694
Date Filed
September 6, 2002
Patent primary examiner
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