Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 20, 2023
0Patent Application Number
174819810
Date Filed
September 22, 2021
0Patent Citations
Patent Primary Examiner
A semiconductor structure includes a set of mandrel lines and a set of non-mandrel lines disposed on a hardmask in an alternating pattern. Spacers are disposed between adjacent mandrel lines and non-mandrel lines. The spacers include a composition which exhibits an etch rate greater than an etch rate of the mandrel lines and the non-mandrel lines.
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