Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 27, 2023
0Patent Application Number
169881250
Date Filed
August 7, 2020
0Patent Citations
Patent Primary Examiner
An ultrasonic transducer device is provided. In some embodiments, the ultrasonic transducer device includes a substrate having a membrane support layer formed on a bottom cavity layer, and an opening in the membrane support layer so as to form a transducer cavity. In some embodiments, the opening comprises a truncated circle shape.
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