Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gregory L. Charvat0
Keith G. Fife0
Nevada J. Sanchez0
Tyler S. Ralston0
Jonathan M. Rothberg0
Date of Patent
January 3, 2017
0Patent Application Number
141728400
Date Filed
February 4, 2014
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
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