Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 27, 2023
0Patent Application Number
170863110
Date Filed
October 30, 2020
0Patent Citations
...
Patent Primary Examiner
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
