Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keith G. Fife0
Tyler S. Ralston0
Gregory L. Charvat0
Jonathan M. Rothberg0
Nevada J. Sanchez0
Date of Patent
August 1, 2017
0Patent Application Number
151589680
Date Filed
May 19, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
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