Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jonathan M. Rothberg0
Nevada J. Sanchez0
Keith G. Fife0
Gregory L. Charvat0
Tyler S. Ralston0
Date of Patent
December 5, 2023
0Patent Application Number
165628210
Date Filed
September 6, 2019
0Patent Citations
...
Patent Primary Examiner
Patent abstract
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
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