Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nevada J. Sanchez0
Gregory L. Charvat0
Jonathan M. Rothberg0
Keith G. Fife0
Tyler S. Ralston0
Date of Patent
December 31, 2019
Patent Application Number
15868989
Date Filed
January 11, 2018
Patent Citations
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
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