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US Patent 11688462 Three-dimensional flash memory with back gate

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Is a
Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116884620
Date of Patent
June 27, 2023
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Patent Application Number
173539830
Date Filed
June 22, 2021
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Patent Citations
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US Patent 9312134 Nonvolatile semiconductor memory device and method for manufacturing same
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US Patent 9355727 Three-dimensional memory structure having a back gate electrode
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US Patent 9449985 Memory cell with high-k charge trapping layer
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US Patent 9627395 Enhanced channel mobility three-dimensional memory structure and method of making thereof
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US Patent 9786679 Method for manufacturing semiconductor memory device
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US Patent 9824966 Three-dimensional memory device containing a lateral source contact and method of making the same
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US Patent 10073643 Method of initializing storage device including one or more interface chips and nonvolatile memory devices connected to the one or more interface chips
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US Patent 10304541 Memory device
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Patent Primary Examiner
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Leon Viet Q Nguyen
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CPC Code
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G11C 16/08
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G11C 16/16
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G11C 16/24
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G11C 16/26
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G11C 16/30
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H01L 27/11519
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H01L 27/11524
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H01L 27/11529
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Disclosed is a three-dimensional flash memory including a back gate, which includes word lines extended and formed in a horizontal direction on a substrate so as to be sequentially stacked, and strings penetrating the word lines and extended and formed in one direction on the substrate. Each of the strings includes a channel layer extended and formed in the one direction, and a charge storage layer extended and formed in the one direction to surround the channel layer, the channel layer and the charge storage layer constitute memory cells corresponding to the word lines, and the channel layer includes a back gate extended and formed in the one direction, with at least a portion of the back gate surrounded by the channel layer, and an insulating layer extended and formed in one direction between the back gate and the channel layer.

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