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US Patent 11688584 Programmable ignition profiles for enhanced plasma ignition

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
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Date Filed
April 29, 2020
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Date of Patent
June 27, 2023
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Patent Applicant
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
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Patent Application Number
16861458
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Patent Citations
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US Patent 9524854 Electrostatic remote plasma source system and method
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US Patent 9536713 Reliable plasma ignition and reignition
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US Patent 9577516 Apparatus for controlled overshoot in a RF generator
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US Patent 9578731 Systems and methods for obtaining information about a plasma load
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US Patent 9685297 Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
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US Patent 9736920 Apparatus and method for plasma ignition with a self-resonating device
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US Patent 9756713 Method and control unit for operating a plasma generation apparatus
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US Patent 9767988 Method of controlling the switched mode ion energy distribution system
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US Patent 10194518 Noise based frequency tuning and identification of plasma characteristics
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US Patent 10269540 Impedance matching system and method of operating the same
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11688584
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Patent Primary Examiner
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Tung X Le
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CPC Code
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H01J 37/32935
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H01J 37/32128
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H01J 37/3299
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H01J 37/32366
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H01J 37/32715
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H01J 37/32137
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H01J 37/32926
0

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