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US Patent 11691244 Multi-toothed, magnetically controlled retaining ring
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Date Filed
June 28, 2021
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Date of Patent
July 4, 2023
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Patent Applicant
Applied Materials
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Patent Application Number
17360138
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Patent Citations
US Patent 9368371 Retaining ring having inner surfaces with facets
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US Patent 9403255 Polishing apparatus and polishing method
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US Patent 9434044 Polishing apparatus
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US Patent 9472475 Feedback control using detection of clearance and adjustment for uniform topography
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US Patent 11400561 Top ring for holding a substrate and substrate processing apparatus
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US Patent 10702972 Polishing apparatus
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US Patent 7276743 Retaining ring with conductive portion
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US Patent 7326105 Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces
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US Patent 7520795 Grooved retaining ring
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US Patent 8517803 Retaining ring for chemical mechanical polishing
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•••
Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11691244
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Patent Primary Examiner
Don M Anderson
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