Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 18, 2023
0Patent Application Number
177730030
Date Filed
October 12, 2020
0Patent Citations
Patent Primary Examiner
A calibration system includes a plate, a fixed alignment mark, and a variable diffraction grating. The plate is adjacent to a wafer alignment mark disposed on a wafer. The fixed alignment mark is disposed on the plate and is configured to act as a reference mark for an initial calibration of the calibration system. The variable diffraction grating is disposed on the plate and includes a plurality of unit cells configured to form a plurality of variable alignment marks. The variable diffraction grating is configured to calibrate a shift-between-orders of one of the variable alignment marks and the fixed alignment mark.
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