Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 26, 2006
Patent Application Number
10665720
Date Filed
September 22, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of device inspection, the method comprising providing an asymmetric marker on a device to be inspected, the form of asymmetry of the marker being dependent upon the parameter to be inspected, directing light at the marker, obtaining a first measurement of the position of the marker via detection of diffracted light of a particular wavelength or diffraction angle, obtaining a second measurement of the position of the marker via detection of diffracted light of a different wavelength or diffraction angle, and comparing the first and second measured positions to determine a shift indicative of the degree of asymmetry of the marker.
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