Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 1, 2023
0Patent Application Number
171813150
Date Filed
February 22, 2021
0Patent Citations
...
Patent Primary Examiner
A nanowire FET device includes a vertical stack of nanowire strips configured as the semiconductor body. One or more of the top nanowire strips are receded and are shorter than the rest of the nanowire strips stacked lower. Inner spacers are uniformly formed adjacent to the receded nanowire strips and the rest of the nanowire strips. Source/drain structures are formed outside the inner spacers and a gate structure is formed inside the inner spacers, which wraps around the nanowire strips.
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