Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Lien Huang0
Chi-Wen Liu0
Chun-Hsiung Lin0
Date of Patent
January 3, 2017
0Patent Application Number
146407260
Date Filed
March 6, 2015
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Vertical gate all around (VGAA) devices and methods of manufacture thereof are described. A method for manufacturing a VGAA device includes: forming a first doped region having a first conductivity in a substrate; forming a second doped region having a second conductivity different from the first conductivity in the substrate, the second doped region disposed laterally adjacent to and spaced apart from the first doped region; and oxidizing a semiconductive layer disposed between the substrate and the second doped region to form an oxidized isolation layer.
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