US Patent 11746085 Triphenylsulfonium salt compound, and uses thereof

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11746085

Patent Inventor Names

Xiaochun Qian

Date of Patent

September 5, 2023

Patent Application Number

17284274

Date Filed

September 27, 2019

Patent Citations

‌

US Patent 11435665 Resist composition and patterning process

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US Patent 11467490 Salt, acid generator, resist composition and method for producing resist pattern

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US Patent 11281099 Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound

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