Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 6, 2022
Patent Application Number
16426673
Date Filed
May 30, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
A resist composition comprising a base polymer and an onium salt of N-carbonylsulfonamide having iodized benzene ring offers a high sensitivity, minimal LWR and improved CDU, independent of whether it is of positive or negative tone.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
