US Patent 12072628 Resist composition and pattern forming process

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

120726280

Patent Inventor Names

Jun Hatakeyama0

Tomomi Watanabe0

Date of Patent

August 27, 2024

Patent Application Number

171974660

Date Filed

March 10, 2021

Patent Citations

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US Patent 11435665 Resist composition and patterning process

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US Patent 10698314 Chemically amplified resist composition and patterning process

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US Patent 11415887 Resist composition and patterning process

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