US Patent 11748872 Setting up inspection of a specimen
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US Patent 11748872 Setting up inspection of a specimen
Article
Methods and systems for setting up inspection of a specimen are provided. One system includes one or more computer subsystems configured for acquiring a reference image for a specimen and modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image. The one or more computer subsystems are also configured for storing the golden grid image for use in inspection of the specimen. The inspection includes aligning a test image of the specimen generated from output of an inspection subsystem to the golden grid image.
Infobox
Is a
Patent Jurisdiction
Patent Number
11748872
Patent Inventor Names
Abdurrahman Sezginer
Bjorn Brauer
Ge Cong
Hong Chen
Sangbong Park
Xiaochun Li
Date of Patent
September 5, 2023
Patent Application Number
17165826
Date Filed
February 2, 2021
Patent Citations
Patent Primary Examiner
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