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US Patent 11748872 Setting up inspection of a specimen

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

February 2, 2021

Date of Patent

September 5, 2023

Patent Application Number

17165826

Patent Citations

US Patent 8126255 Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

US Patent 8664594 Electron-optical system for high-speed and high-sensitivity inspections

US Patent 8692204 Apparatus and methods for electron beam detection

US Patent 8698093 Objective lens with deflector plates immersed in electrostatic lens field

US Patent 8716662 Methods and apparatus to review defects using scanning electron microscope with multiple electron beam configurations

US Patent 9222895 Generalized virtual inspector

US Patent 9092846 Detecting defects on a wafer using defect-specific and multi-channel information

US Patent 10186026 Single image detection

US Patent 7570796 Methods and systems for utilizing design data in combination with inspection data

US Patent 7676077 Methods and systems for utilizing design data in combination with inspection data

Patent Inventor Names

Xiaochun Li

Ge Cong

Bjorn Brauer

Sangbong Park

Abdurrahman Sezginer

Hong Chen

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

CPC Code

G01N 2021/95676

G06T 2207/20224

G06T 2207/20021

G06T 2207/30148

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