Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Weijiang Zhao
Jian Wang
Shinsuke Inoue
Takashi Sakamoto
Yuta Iwanami
Date of Patent
September 5, 2023
Patent Application Number
17468879
Date Filed
September 8, 2021
Patent Citations
Patent Primary Examiner
An ion implantation apparatus includes a transfer device that transfers a wafer, a support device that supports the wafer at an implantation position, and a control device that controls the ion implantation apparatus to perform chain implantation processing on the wafer, and that controls the transfer device or the support device according to warpage information of the wafer.
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