US Patent 11749501 Ion implantation apparatus
Is a
Date Filed
September 8, 2021
Date of Patent
September 5, 2023
Patent Application Number
17468879
Patent Inventor Names
Weijiang Zhao
Jian Wang
Shinsuke Inoue
Takashi Sakamoto
Yuta Iwanami
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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