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US Patent 11749532 Methods and apparatus for processing a substrate

Patent 11749532 was granted and assigned to Applied Materials on September, 2023 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11749532

Patent Inventor Names

Mehul Naik

Chi Lu

He Ren

Hao Jiang

Date of Patent

September 5, 2023

Patent Application Number

17307383

Date Filed

May 4, 2021

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Patent Primary Examiner

CPC Code

Methods and apparatus for processing a substrate are provided. For example, a method of processing a substrate comprises supplying oxygen (O

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