US Patent 11749532 Methods and apparatus for processing a substrate
Patent 11749532 was granted and assigned to Applied Materials on September, 2023 by the United States Patent and Trademark Office.
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US Patent 11749532 Methods and apparatus for processing a substrate
Article
Methods and apparatus for processing a substrate are provided. For example, a method of processing a substrate comprises supplying oxygen (O
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
11749532
Patent Inventor Names
Chi Lu
Hao Jiang
He Ren
Mehul Naik
Date of Patent
September 5, 2023
Patent Application Number
17307383
Date Filed
May 4, 2021
Patent Citations
Patent Primary Examiner
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