Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keiji Saneyoshi
Hikaru Izumitani
Makoto Ito
Date of Patent
September 5, 2023
Patent Application Number
17614671
Date Filed
May 20, 2020
Patent Citations
Patent Citations Received
Patent Primary Examiner
A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.
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