US Patent 11750115 Stacked electrostatic actuator
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US Patent 11750115 Stacked electrostatic actuator
Article
A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.
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Is a
Patent Jurisdiction
Patent Number
11750115
Patent Inventor Names
Hikaru Izumitani
Keiji Saneyoshi
Makoto Ito
Date of Patent
September 5, 2023
Patent Application Number
17614671
Date Filed
May 20, 2020
Patent Citations
Patent Primary Examiner
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