Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Qin-Yi Tong
Date of Patent
September 19, 2023
Patent Application Number
16521493
Date Filed
July 24, 2019
Patent Citations
...
Patent Primary Examiner
Patent abstract
A method of bonding includes using a bonding layer having a fluorinated oxide. Fluorine may be introduced into the bonding layer by exposure to a fluorine-containing solution, vapor or gas or by implantation. The bonding layer may also be formed using a method where fluorine is introduced into the layer during its formation. The surface of the bonding layer is terminated with a desired species, preferably an NH
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
