Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yi-Chuan Teng0
Chun-Wen Cheng0
Date of Patent
May 23, 2017
Patent Application Number
14792058
Date Filed
July 6, 2015
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The present disclosure provides a CMOS-MEMS device structure. The CMOS-MEMS device structure includes a sensing substrate and a CMOS substrate. The sensing substrate includes a bonding mesa structure. The CMOS substrate includes a top dielectric layer. The sensing substrate and the CMOS substrate are bonded through the bonding mesa structure, and the bonding mesa structure defines a bonding gap between the CMOS substrate and the sensing substrate.
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