Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Benyamin Gholami Bazehhour
Milena Vujosevic
Roberto Brioschi
Kazunori Hayata
Date of Patent
September 19, 2023
Patent Application Number
17343919
Date Filed
June 10, 2021
Patent Citations
Patent Primary Examiner
Patent abstract
A microelectromechanical system (MEMS) sensor package includes a laminate that provides physical support and electrical connection to a MEMS sensor. A resin layer is embedded within an opening of the laminate and a MEMS support layer is embedded within the opening by the resin layer. A MEMS structure of the MEMS sensor is located on the upper surface of the MEMS support layer.
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