Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Feng Q. Liu
Chandan Kr Barik
Bhaskar Jyoti Bhuyan
Chandan Das
Doreen Wei Ying Yong
John Sudijono
Mark Saly
Date of Patent
September 19, 2023
Patent Application Number
17236020
Date Filed
April 21, 2021
Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
Molybdenum(0) and coordination complexes are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum disulfide, molybdenum nitride). The exposures can be sequential or simultaneous.
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