Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junji Ueyama0
Hiroki Sato0
Date of Patent
July 4, 2017
0Patent Application Number
144211540
Date Filed
October 15, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound.
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