Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Benjamin Roy Moss
Ehsan Shah Hosseini
Michael Robert Watts
Peter Nicholas Russo
Christopher Vincent Poulton
Date of Patent
September 19, 2023
Patent Application Number
17719808
Date Filed
April 13, 2022
Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
A plurality of waveguide structures are formed in at least one silicon layer of a first member. The first member includes: a first surface of a first silicon dioxide layer that is attached to a second member that consists essentially of an optically transmissive material having a thermal conductivity less than about 50 W/(m·K), and a second surface of material that was deposited over at least some of the plurality of waveguide structures. An array of phase shifters is formed in one or more layers of the first member. An array of temperature controlling elements are in proximity to the array of phase shifters.
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