Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peggy J. Clews0
Roy H. Olsson0
Kenneth Wojciechowski0
Todd Bauer0
Date of Patent
May 9, 2017
Patent Application Number
13959136
Date Filed
August 5, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
Thermally isolated devices may be formed by performing a series of etches on a silicon-based substrate. As a result of the series of etches, silicon material may be removed from underneath a region of an integrated circuit (IC). The removal of the silicon material from underneath the IC forms a gap between remaining substrate and the integrated circuit, though the integrated circuit remains connected to the substrate via a support bar arrangement that suspends the integrated circuit over the substrate. The creation of this gap functions to release the device from the substrate and create a thermally-isolated integrated circuit.
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