US Patent 11762304 Lithographic apparatus
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US Patent 11762304 Lithographic apparatus
Article
Patent abstract
A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
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Patent Jurisdiction
Patent Number
Patent Inventor Names
Anne Willemijn Bertine Quist
Bart Dinand Paarhuis
Daan Daniel Johannes Antonius Van Sommeren
Francis Fahrni
Frank Johannes Jacobus Van Boxtel
Güneş Nak{dot over (i)}boğlu
Maarten Holtrust
Martinus Van Duijnhoven
Date of Patent
September 19, 2023
Patent Application Number
15570934
Date Filed
March 29, 2016
Patent Citations
Patent Primary Examiner
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