Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michishige Saito
Shota Kaneko
Date of Patent
September 19, 2023
Patent Application Number
16778071
Date Filed
January 31, 2020
Patent Primary Examiner
Patent abstract
A placing table, on which a substrate is placed, includes a base. The base includes a first path configured to allow a heat transfer medium having a first temperature to flow therein; a first heat insulating layer disposed under the first path; and a seal member disposed under the first heat insulating layer.
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