US Patent 11764040 Placing table and substrate processing apparatus
Patent 11764040 was granted and assigned to Tokyo Electron on September, 2023 by the United States Patent and Trademark Office.
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US Patent 11764040 Placing table and substrate processing apparatus
Article
Patent abstract
A placing table, on which a substrate is placed, includes a base. The base includes a first path configured to allow a heat transfer medium having a first temperature to flow therein; a first heat insulating layer disposed under the first path; and a seal member disposed under the first heat insulating layer.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michishige Saito
Shota Kaneko
Date of Patent
September 19, 2023
Patent Application Number
16778071
Date Filed
January 31, 2020
Patent Primary Examiner
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