Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chun-Hsu Yen
Chen-Hui Yang
Yu-Chuan Hsu
Date of Patent
September 19, 2023
Patent Application Number
17571260
Date Filed
January 7, 2022
Patent Citations
Patent Primary Examiner
Patent abstract
A method for making a memory device, includes: forming a first dielectric layer over a bottom electrode; forming a first void extending through the first dielectric layer to expose a portion of an upper boundary of the bottom electrode; forming a first conductive structure lining along respective sidewalls of the first void and the exposed portion of the upper boundary of the bottom electrode; filling the first void with the first dielectric layer; and forming a phase change material layer over the first dielectric layer to cause the phase change material layer to contact at least a portion of a sidewall of the first conductive structure.
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