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US Patent 11774867 Radiation measurement system
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US Patent 11774867 Radiation measurement system
Article
Patent abstract
A radiation measurement system (
Infobox
Is a
Patent
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11774867
Patent Inventor Names
Herman Philip Godfried
Wilhelmus Patrick Elisabeth Maria Op 'T Root
Date of Patent
October 3, 2023
Patent Application Number
17433494
Date Filed
January 27, 2020
Patent Citations
US Patent 7282701 Sensor for use in a lithographic apparatus
US Patent 7655367 Lithographic apparatus and device manufacturing method
US Patent 8896816 Projection exposure method, projection exposure apparatus, laser radiation source and bandwidth narrowing module for a laser radiation source
US Patent 9791780 Exposure apparatus
US Patent 9983060 Calibration of a spectral analysis module
US Patent 10288483 Recovering spectral shape from spatial output
Patent Primary Examiner
Uzma Alam
CPC Code
G01J 3/45
G01J 3/4531
G01J 3/26
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