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US Patent 11781039 Polishing composition and polishing method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
December 22, 2017
Date of Patent
October 10, 2023
Patent Application Number
16473346
Patent Citations
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US Patent 10428255 Shaped abrasive particle and method of forming same
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US Patent 8557133 Chemical mechanical polishing of silicon carbide comprising surfaces
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US Patent 9343330 Compositions for polishing aluminum/copper and titanium in damascene structures
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US Patent 7112123 Chemical-mechanical polishing (CMP) slurry containing clay and CeO
Patent Inventor Names
Tomoaki Ishibashi
Hiroki Kon
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781039
Patent Primary Examiner
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Shamim Ahmed

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