Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yousuke Kondo
Date of Patent
October 10, 2023
Patent Application Number
17986074
Date Filed
November 14, 2022
Patent Citations
Patent Primary Examiner
Patent abstract
An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.
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