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US Patent 11782341 Imprint apparatus and article manufacturing method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
November 14, 2022
Date of Patent
October 10, 2023
Patent Application Number
17986074
Patent Citations
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US Patent 11584063 Imprint method, imprint apparatus, and article manufacturing method
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US Patent 11590754 Imprint apparatus and article manufacturing method
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US Patent 7309225 Moat system for an imprint lithography template
‌
US Patent 7941234 Exposure apparatus and parameter editing method
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US Patent 9494874 Method and apparatus for design of a metrology target
‌
US Patent 9965577 System and method for performing directed self-assembly in a 3-D virtual fabrication environment
Patent Inventor Names
Yousuke Kondo
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11782341
Patent Primary Examiner
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Benjamin A Schiffman

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