US Patent 11784033 Methods and apparatus for processing a substrate
Patent 11784033 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 28, 2021
Date of Patent
October 10, 2023
Patent Applicant
Patent Application Number
17333732
Patent Citations
Patent Inventor Names
Jiao Song
Palaniappan Chidambaram
Mengxue Wu
Jay Min Soh
Chul Nyoung Lee
Siew Kit Hoi
Yue Cui
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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