Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Johannes Manz
Wolfgang Klein
David Tumpold
Date of Patent
October 17, 2023
Patent Application Number
17647403
Date Filed
January 7, 2022
Patent Citations
Patent Primary Examiner
Patent abstract
A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.
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