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US Patent 9002037 MEMS structure with adjustable ventilation openings

Patent 9002037 was granted and assigned to Infineon Technologies on April, 2015 by the United States Patent and Trademark Office.

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Patent abstract

A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.

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