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US Patent 9002037 MEMS structure with adjustable ventilation openings

Patent 9002037 was granted and assigned to Infineon Technologies on April, 2015 by the United States Patent and Trademark Office.

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Patent abstract

A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.

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Patent Citations Received
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US Patent 11788990 Photoacoustic sensor valve
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Patent Inventor Names
Alfons Dehe0
Martin Wurzer0
Matthias Herrmann0
Stefan Barzen0
Ulrich Krumbein0
Wolfgang Friza0
Wolfgang Klein0
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=090020370
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US Patent 09002037 MEMS structure with adjustable ventilation openings US Patent 9002037 MEMS structure with adjustable ventilation openings

Infobox
Patent Number
090020370
Patent Number
90020370
Edits on 31 Mar, 2023
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edited on 31 Mar, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Infineon Technologies
Infineon Technologies
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
090020370
Date of Patent
April 7, 2015
0
Patent Application Number
135313730
Date Filed
June 22, 2012
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=090020370
Patent Primary Examiner
‌
Matthew Eason
0
Edits on 8 Jun, 2022
"Entity importer update"
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09002037
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 US Patent 09002037 MEMS structure with adjustable ventilation openings

Infobox
Is a
Patent
Patent
Current assignee
Infineon Technologies
Infineon Technologies
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09002037
Date of patent
April 7, 2015
Patent application number
13531373
Date Filed
June 22, 2012
Patent primary examiner
‌
Matthew Eason

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