US Patent 9002037 MEMS structure with adjustable ventilation openings
Patent 9002037 was granted and assigned to Infineon Technologies on April, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 22, 2012
0
Date of Patent
April 7, 2015
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Patent Application Number
13531373
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Patent Citations Received
Patent Inventor Names
Wolfgang Friza
0
Wolfgang Klein
0
Alfons Dehe
0
Martin Wurzer
0
Matthias Herrmann
0
Stefan Barzen
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Ulrich Krumbein
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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