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US Patent 11790513 Defect inspection apparatus and defect inspection method

Patent 11790513 was granted and assigned to Shimadzu Corp. on October, 2023 by the United States Patent and Trademark Office.

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Patent Applicant

Current Assignee

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Koki Yoshida

Kenji Takubo

Takahide Hatahori

Date of Patent

October 17, 2023

Patent Application Number

17601900

Date Filed

April 17, 2019

Patent Citations

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US Patent 9423356 Illumination apparatus and inspection apparatus

US Patent 9436990 Defect observation method and device therefor

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CPC Code

Patent abstract

This defect inspection apparatus (

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