Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Raja Fazan Gul0
António José Marques Trindade0
Ronald S. Cok0
Date of Patent
December 5, 2023
0Patent Application Number
170664210
Date Filed
October 8, 2020
0Patent Citations
...
Patent Citations Received
0
Patent Primary Examiner
Patent abstract
An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.
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